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1

Applying Metamaterial-Based Repeater in LC Passive Wireless Sensors to Enhance Readout

Dong, Lei, Wang, Li-Feng, Huang, Qing-An

Journal:

IEEE Sensors Journal

Year:

2018

Language:

english

File:

PDF, 1.67 MB

english, 2018

2

[Micro/Nano Technologies] Micro Electro Mechanical Systems || Modeling and Simulation of SU-8 Thick Photoresist Lithography

Year:

2018

Language:

english

File:

PDF, 967 KB

english, 2018

3

Comprehensive Simulations for Ultraviolet Lithography Process of Thick SU-8 Photoresist

Zhou, Zai-Fa, Huang, Qing-An

Journal:

Year:

2018

Language:

english

File:

PDF, 3.67 MB

english, 2018

4

Laterally-actuated inside-driven RF MEMS switches fabricated by a SOG process

Wang, Li-Feng, Han, Lei, Tang, Jie-Ying, Huang, Qing-An

Journal:

Journal of Micromechanics and Microengineering

Year:

2015

Language:

english

File:

PDF, 2.42 MB

english, 2015

5

Strain Effect of the Dielectric Constant in Silicon Dioxide

Huang, Jian-Qiu, Huang, Qing-An, Qin, Ming, Dong, Weijie, Chen, Xiaowei

Journal:

Journal of Microelectromechanical Systems

Year:

2010

Language:

english

File:

PDF, 213 KB

english, 2010

6

In-line method for extracting the temperature coefficient of resistance of surface-micromachined polysilicon thin films

Gaobin Xu, Yang Li, Qing-An Huang, Weihua Li

Journal:

Sensors and Actuators A: Physical

Year:

2007

Language:

english

File:

PDF, 923 KB

english, 2007

7

A system-level model for a silicon thermal flow sensor

Guang-Ping Shen, Ming Qin, Qing-An Huang

Journal:

Microsystem Technologies

Year:

2009

Language:

english

File:

PDF, 496 KB

english, 2009

8

A Fully Packaged CMOS Interdigital Capacitive Humidity Sensor With Polysilicon Heaters

Zhao, Cheng-Long, Qin, Ming, Huang, Qing-An

Journal:

IEEE Sensors Journal

Year:

2011

Language:

english

File:

PDF, 1.02 MB

english, 2011

9

A Micromachined Inline-Type Wideband Microwave Power Sensor Based on GaAs MMIC Technology

Lei Han,, Qing-An Huang,, Xiao-Ping Liao,, Shi Su,

Journal:

Journal of Microelectromechanical Systems

Year:

2009

Language:

english

File:

PDF, 754 KB

english, 2009

10

Micromachining of Pyrex 7740 Glass by Silicon Molding and Vacuum Anodic Bonding

Liu, Junwen, Shang, Jintang, Tang, Jieying, Huang, Qing-An

Journal:

Journal of Microelectromechanical Systems

Year:

2011

Language:

english

File:

PDF, 1.08 MB

english, 2011

11

Flip-Chip Packaging for a Two-Dimensional Thermal Flow Sensor Using a Copper Pillar Bump Technology

Sun, Jian-Bo, Qin, Ming, Huang, Qing-An

Journal:

IEEE Sensors Journal

Year:

2007

Language:

english

File:

PDF, 758 KB

english, 2007

12

Gamma Irradiation Effects on Surface-Micromachined Polysilicon Resonators

Wang, Lei, Tang, Jieying, Huang, Qing-An

Journal:

Journal of Microelectromechanical Systems

Year:

2011

Language:

english

File:

PDF, 290 KB

english, 2011

13

Large scale three-dimensional simulations for thick SU-8 lithography process based on a full hash fast marching method

Zhou, Zai-Fa, Shi, Li-Li, Zhang, Heng, Huang, Qing-An

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 793 KB

english, 2014

14

SPIE Proceedings [SPIE International Symposium on Optoelectonics and Microelectronics - Nanjing, China (Wednesday 7 November 2001)] Micromachining and Microfabrication Process Technology and Devices - Gray-scale mask fabrication system for diffractive micro-optics

Li, Shengyi, Lin, Zhe-hui, Luo, Bing, Dai, Yi-fan, Tien, Norman C., Huang, Qing-An

Year:

2001

Language:

english

File:

PDF, 195 KB

english, 2001

15

LC Wireless Sensitive Pressure Sensors With Microstructured PDMS Dielectric Layers for Wound Monitoring

Deng, Wen-Jun, Wang, Li-Feng, Dong, Lei, Huang, Qing-An

Journal:

IEEE Sensors Journal

Year:

2018

Language:

english

File:

PDF, 1.02 MB

english, 2018

16

A Simple Extraction Method of Young’s Modulus for Multilayer Films in MEMS Applications

Guo, Xin-Ge, Zhou, Zai-Fa, Sun, Chao, Li, Wei-Hua, Huang, Qing-An

Journal:

Year:

2017

Language:

english

File:

PDF, 1.40 MB

english, 2017

17

[Micro/Nano Technologies] Micro Electro Mechanical Systems Volume 2 || Micro Thermal Flow Sensor

Year:

2017

Language:

english

File:

PDF, 1.76 MB

english, 2017

18

[Micro/Nano Technologies] Micro Electro Mechanical Systems Volume 2 || Modeling and Simulation of SU-8 Thick Photoresist Lithography

Year:

2017

Language:

english

File:

PDF, 921 KB

english, 2017

19

Quadruple sensitivity improvement for wind speed sensor using dual-layer bended inductors

Yi, Zhenxiang, Wan, Yu, Qin, Ming, Huang, Qing-An

Journal:

Sensors and Actuators A: Physical

Year:

2020

Language:

english

File:

PDF, 1007 KB

english, 2020

20

A novel bonding technology for GaAs sensors

Qing-An Huang, Shi-Ji Lu, Qin-Yi Tong

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 362 KB

english, 1990

21

An analytical model for pull-in voltage of clamped–clamped multilayer beams

Hua Rong, Qing-An Huang, Meng Nie, Weihua Li

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 190 KB

english, 2004

22

Modeling, design and fabrication of a triple-layered capacitive pressure sensor

Min-Xin Zhou, Qing-An Huang, Ming Qin

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 780 KB

english, 2005

23

Measurement of residual stress in multilayered thin films by a full-field optical method

Meng Nie, Qing-An Huang, Weihua Li

Journal:

Sensors and Actuators A: Physical

Year:

2006

Language:

english

File:

PDF, 349 KB

english, 2006

24

Macro-modeling for polysilicon cascaded bent beam electrothermal microactuators

Yuxing Zhang, Qing-An Huang, Ren-Gang Li, Weihua Li

Journal:

Sensors and Actuators A: Physical

Year:

2006

Language:

english

File:

PDF, 623 KB

english, 2006

25

A silicon directly bonded capacitive absolute pressure sensor

Fang He, Qing-An Huang, Ming Qin

Journal:

Sensors and Actuators A: Physical

Year:

2007

Language:

english

File:

PDF, 1.04 MB

english, 2007

26

Pull-in characterization of doubly-clamped composite beams

Meng Nie, Qing-An Huang, Weihua Li

Journal:

Sensors and Actuators A: Physical

Year:

2009

Language:

english

File:

PDF, 1.57 MB

english, 2009

27

A simple approach to characterizing the driving force of polysilicon laterally driven thermal microactuators

Qing-An Huang, Neville Ka Shek Lee

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 178 KB

english, 2000

28

A nodal analysis method for simulating the behavior of electrothermal microactuators

Ren-Gang Li, Qing-An Huang, Wei-Hua Li

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 582 KB

english, 2008

29

Analysis of electromagnetic interference of a capacitive RF MEMS switch during switching

Xiao-Lin Yuan, Qing-An Huang, Xiao-Ping Liao

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 728 KB

english, 2008

30

A nodal analysis model for the out-of-plane beamshape electrothermal microactuator

Rengang Li, Qing-An Huang, Weihua Li

Journal:

Microsystem Technologies

Year:

2009

Language:

english

File:

PDF, 413 KB

english, 2009

31

Influence of environmental temperature on the dynamic properties of a die attached MEMS device

Jing Song, Qing-An Huang, Ming Li, Jie-Ying Tang

Journal:

Microsystem Technologies

Year:

2009

Language:

english

File:

PDF, 601 KB

english, 2009

32

A nodal analysis method for electromechanical behavior simulation of bow-tie shaped microbeams

Min Li, Qing-An Huang, Wei-Hua Li

Journal:

Microsystem Technologies

Year:

2009

Language:

english

File:

PDF, 416 KB

english, 2009

33

A FCOB packaged thermal wind sensor with compensation

Guang-Ping Shen, Ming Qin, Qing-An Huang, Hua Zhang, Jian Wu

Journal:

Microsystem Technologies

Year:

2010

Language:

english

File:

PDF, 851 KB

english, 2010

34

Gold Stud Bumps Flip-Chip Bonded onto Copper Electrodes with Titanium and Silver Layers

Cheng-Li Chuang, Jong-Ning Aoh, Qing-An Liao, Chun-Chieh Hsu, Shi-Jie Liao, Guo-Shing Huang

Journal:

Journal of Electronic Materials

Year:

2008

Language:

english

File:

PDF, 625 KB

english, 2008

35

GaAs piezoelectric modulated resistors

Qing-An Huang, Qin-Yi Tong, Shi-Ji Lu

Journal:

Sensors and Actuators A: Physical

Year:

1993

Language:

english

File:

PDF, 628 KB

english, 1993

36

Gamma and electron beam irradiation effects on the resistance of micromachined polycrystalline silicon beams

Lei Wang, Jieying Tang, Qing-An Huang

Journal:

Sensors and Actuators A: Physical

Year:

2012

Language:

english

File:

PDF, 1.19 MB

english, 2012

37

Fabrication of a Micromachined Two-Dimensional Wind Sensor by Au–Au Wafer Bonding Technology

Ziqiang Dong, Jingjing Chen, Yukun Qin, Ming Qin, Qing-An Huang

Journal:

Journal of Microelectromechanical Systems

Year:

2012

Language:

english

File:

PDF, 1.36 MB

english, 2012

38

A novel capacitive pressure sensor based on sandwich structures

Min-Xin Zhou, Qing-An Huang, Ming Qin, Wei Zhou

Journal:

Journal of Microelectromechanical Systems

Year:

2005

Language:

english

File:

PDF, 1.21 MB

english, 2005

39

[IEEE 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Shenzhen, China (2009.01.5-2009.01.8)] 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Effect of temperature and elastic constant correction on piezoresistivity of silicon nanobeams

Zhang, Jia-Hong, Huang, Qing-An, Yu, Hong

Year:

2009

Language:

english

File:

PDF, 3.89 MB

english, 2009

40

Analysis and design of polysilicon thermal flexure actuator

Huang, Qing-An, Lee, Neville Ka Shek

Journal:

Journal of Micromechanics and Microengineering

Year:

1999

Language:

english

File:

PDF, 314 KB

english, 1999

41

A novel 2D dynamic cellular automata model for photoresist etching process simulation

Zhou, Zai-Fa, Huang, Qing-An, Li, Wei-Hua, Lu, Wei

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 407 KB

english, 2005

42

[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Gamma irradiation effects on resistance of surface micromachined polycrystalline silicon beams in MEMS

Wang, Lei, Tang, Jieying, Song, Jing, Huang, Qing-An

Year:

2011

Language:

english

File:

PDF, 898 KB

english, 2011

43

Effects of Ambient Humidity on a Micromachined Silicon Thermal Wind Sensor

Chen, Bei, Zhu, Yan-Qing, Qin, Ming, Huang, Qing-An

Journal:

Journal of Microelectromechanical Systems

Year:

2014

Language:

english

File:

PDF, 398 KB

english, 2014

44

RF MEMS membrane switches on GaAs substrates for X-band applications

Wei-Bin Zheng,, Qing-An Huang,, Xiao-Ping Liao,, Fu-Xiao Li,

Journal:

Journal of Microelectromechanical Systems

Year:

2005

Language:

english

File:

PDF, 806 KB

english, 2005

45

Novel DC-40GHz MEMS series-shunt switch for high isolation and high power applications

Zhu, Yan-qing, Han, Lei, Qin, Ming, Huang, Qing-an

Journal:

Sensors and Actuators A: Physical

Year:

2014

Language:

english

File:

PDF, 3.26 MB

english, 2014

46

In-situ determination of the coefficient of thermal expansion of polysilicon thin films using micro-rotating structures

Liu, Hai-Yun, Li, Wei-Hua, Zhou, Zai-Fa, Huang, Qing-An

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.30 MB

english, 2014

47

Effects of thermally induced packaging stress on a distributed RF MEMS phase shifter

Zhao, Cheng, Song, Jing, Han, Lei, Huang, Qing-An

Journal:

Microsystem Technologies

Year:

2015

Language:

english

File:

PDF, 652 KB

english, 2015

48

[IEEE 2010 Ninth IEEE Sensors Conference (SENSORS 2010) - Kona, HI (2010.11.1-2010.11.4)] 2010 IEEE Sensors - Thermal asymmetry compensation of a wind sensor fabricated on ceramic substrate

Ziqiang Dong,, Qing-An Huang,, Ming Qin,

Year:

2010

Language:

english

File:

PDF, 930 KB

english, 2010

49

Lateral Contact Three-State RF MEMS Switch for Ground Wireless Communication by Actuating Rhombic Structures

Wang, Li-Feng, Han, Lei, Tang, Jie-Ying, Huang, Qing-An

Journal:

Journal of Microelectromechanical Systems

Year:

2013

Language:

english

File:

PDF, 663 KB

english, 2013

50

A Novel Three-State RF MEMS Switch for Ultrabroadband (DC-40 GHz) Applications

Zhu, Yan-Qing, Han, Lei, Wang, Li-Feng, Tang, Jie-Ying, Huang, Qing-An

Journal:

IEEE Electron Device Letters

Year:

2013

Language:

english

File:

PDF, 487 KB

english, 2013